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Optical set up | Infinity-finite conjugates |
Max. Spatial frequency | 600 lp/mm |
Accuracy MTF on-axis | 1% MTF (up to 350 lp/mm) |
Accuracy MTF off-axis | 2% MTF |
Accuracy EFL (Effective Focal Length) |
4 µm |
Accuracy FFL (Flange Focal Length) | 5 µm |
Measurement time display on axis |
1.5 Sec |
Measurement time display all off axis curves |
1.5 Sec |
Throughput of samples (Units per hour) |
2340 UPH |
Measurement Points | 49 (27 field positions / cameras) |
Dimensions (height x width x depth) |
1350 x 1330 x 805 mm |
Weight | 210 Kg |
Sample holder / trays | 3 point kinematic mount tray with certified reference flatness |
Sample quality classes | 4 quality classes |
Cleanroom class FS 209 / ISO14644-1 |
100 / ISO 5 |
* 10 seconds for changing trays, 1 tray includes 148 samples
OptiCentric® 3D 100 | OptiCentric® 3D 300 | |
Measurement accuracy in VIS range | 0.1 µm | 0.1 µm |
Measurement accuracy center thickness (OptiSurt® UltraPrecision) |
1 µm (0.15 µm) |
1 µm (0.15 µm) |
Sample diameter | 0.5 ~ 225 mm | 0.5 ~ 400 mm |
Lens rotation | Air bearing AB 100 (option: lens rotation device) |
Air bearing AB 300 (option: lens rotation device) |
Max. sample weight | Max. 20 kg | 300 kg |
Linear stage | Motorized and PC-controlled | Motorized and PC-controlled |
Measurement head for VIS spectral range |
electronic ACM, 200 mm EFL | electronic ACM, 200 mm EFL |
Light source | High power LED light source | High power LED light source |
1) In stable enviroment conditions in 100 mm height over the top surface of the air bearing
2) Other electronic autocollimators on request
3) Light on request
Parameter | ImageMaster® HR VIS | ImageMaster® HR IR |
Optical set up | Infinite conjugates(finite optional) | Infinite conjugates |
Max. off-axis angle | Up to ± 110˚ | Up to ± 110˚ |
Spectral range | 450...750nm, halogen (NIR/NUV optional) | LWIR 8-12 µm |
Azimuth range | 360˚ | 360˚ |
Max. image height | ± 23 mm | ± 23 mm |
Collimator range | 50-500 mm | 50 mm** |
EFL range of the sample | 1-150 mm* | 1-10 mm*/** |
Spatial frequency (in specification) Max. spatial frequency |
0 ... 500 lp/mm 1000 lp/mm (depending on sample) |
0...60 lp/mm |
Accuracy (MTF on-axis and off-axis) |
± 0.02 MTF | ± 0.03 MTF |
Repeatabillty (MTF on-axis and off-axis) |
± 0.005 MTF | ± 0.02 MTF |
Features | ProCam® Align Smart |
Alignment degrees of freedom (DoF) | up to 6 |
6DoF linear alignment resolution | < 0.1 µm |
Final sample linear alignment accuracy | < 2 µm |
6DoF tilt alignment resolution | < 0.1 arcsec |
Final sample tilt alignment accuracy | < 2 arcmin |
Sample Effective Focal Length | 1 to 12 mm (others on request) |
Sample diameter | 2 to 30 mm (others on request) |
Field of View test chart Field of View collimators |
up to 70˚ up to 170˚ |
Max. UPH (Unit Per Hour) | 120˚ (single head) |
Footprint (Length, Depth, Height) | 1640 mm, 880 m, 1840 mm |
Camera interface | MIPI, SPI, various analog, USB, FireWire, CamLink, GigE, custom (CAN, etc.) |
Dispense technologies | several options |
LED UV cure | several options |
Post-curing | optional (UV/thermal) |
* depending on camera module frame rate, length of curing process and number of different parameters to be measured